Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620250 | Method and apparatus for shielding a device from a semiconductor wafer process chamber | Randy D. Schmieding, Gene Y. Kohara | 2003-09-16 |
| 6563686 | Pedestal assembly with enhanced thermal conductivity | Cheng-Hsiung Tsai, Karl M. Brown | 2003-05-13 |