Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563686 | Pedestal assembly with enhanced thermal conductivity | Karl M. Brown, Thomas Brezoczky | 2003-05-13 |
| 6506291 | Substrate support with multilevel heat transfer mechanism | Chien-Shiung Tzou | 2003-01-14 |