Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645303 | Heater/lift assembly for high temperature processing chamber | Jonathan Frankel, Hari Ponnekanti, Visweswaren Sivaramakrishnan | 2003-11-11 |
| 6506994 | Low profile thick film heaters in multi-slot bake chamber | Yen-Kun Wang, Mark Fodor, Chen-An Chen, Himanshu Pokharna, Son T. Nguyen +1 more | 2003-01-14 |