Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645303 | Heater/lift assembly for high temperature processing chamber | Hari Ponnekanti, Inna Shmurun, Visweswaren Sivaramakrishnan | 2003-11-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645303 | Heater/lift assembly for high temperature processing chamber | Hari Ponnekanti, Inna Shmurun, Visweswaren Sivaramakrishnan | 2003-11-11 |