Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645303 | Heater/lift assembly for high temperature processing chamber | Jonathan Frankel, Inna Shmurun, Visweswaren Sivaramakrishnan | 2003-11-11 |
| 6635115 | Tandem process chamber | Kevin Fairbairn, Jessica E. Barzilai, W. N. (Nick) Taylor | 2003-10-21 |