Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635115 | Tandem process chamber | Jessica E. Barzilai, Hari Ponnekanti, W. N. (Nick) Taylor | 2003-10-21 |
| 6625497 | Semiconductor processing module with integrated feedback/feed forward metrology | Bo Su | 2003-09-23 |