Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663713 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Stuardo Robles, Bang Nguyen, Gayathri Rao, Gary Fong, Vicente Lam +2 more | 2003-12-16 |
| 6645303 | Heater/lift assembly for high temperature processing chamber | Jonathan Frankel, Hari Ponnekanti, Inna Shmurun | 2003-11-11 |
| 6616973 | Liquid phosphorous precursor delivery apparatus | Chau Nguyen | 2003-09-09 |