Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663713 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Stuardo Robles, Visweswaren Sivaramakrishnan, Gayathri Rao, Gary Fong, Vicente Lam +2 more | 2003-12-16 |
| 6599574 | Method and apparatus for forming a dielectric film using helium as a carrier gas | Ellie Yieh, Paul Edward Gee, Li-Qun Xia, Francimar Campana, Shankar Venkataranan +1 more | 2003-07-29 |