Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645824 | Combined optical profilometry and projection microscopy of integrated circuit structures | Junwei Bao, Xinhui Niu, Nickhil Jakatdar, Yasuhiro Okumoto | 2003-11-11 |
| 6627526 | Method for fabricating a conductive structure for a semiconductor device | Bhanwar Singh | 2003-09-30 |
| 6596623 | Use of organic spin on materials as a stop-layer for local interconnect, contact and via layers | Ramkumar Subramanian | 2003-07-22 |
| 6534411 | Method of high density plasma metal etching | Lewis Shen | 2003-03-18 |
| 6515328 | Semiconductor devices with reduced control gate dimensions | Lewis Shen, Mark S. Chang | 2003-02-04 |