Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645824 | Combined optical profilometry and projection microscopy of integrated circuit structures | Wenge Yang, Junwei Bao, Xinhui Niu, Yasuhiro Okumoto | 2003-11-11 |
| 6636843 | System and method for grating profile classification | Srinivas Doddi, Xinhui Niu | 2003-10-21 |
| 6608686 | Measurement of metal electroplating and seed layer thickness and profile | Lawrence Lane, Xinhui Niu | 2003-08-19 |
| 6608690 | Optical profilometry of additional-material deviations in a periodic grating | Xinhui Niu | 2003-08-19 |
| 6609086 | Profile refinement for integrated circuit metrology | Junwei Bao, Srinivas Doddi, Vi Vuong | 2003-08-19 |
| 6538731 | System and method for characterizing macro-grating test patterns in advanced lithography and etch processes | Xinhui Niu | 2003-03-25 |