Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645824 | Combined optical profilometry and projection microscopy of integrated circuit structures | Wenge Yang, Xinhui Niu, Nickhil Jakatdar, Yasuhiro Okumoto | 2003-11-11 |
| 6609086 | Profile refinement for integrated circuit metrology | Srinivas Doddi, Nickhil Jakatdar, Vi Vuong | 2003-08-19 |
| 6597463 | System to determine suitability of sion arc surface for DUV resist patterning | Bhanwar Singh, Cristina Cheung, Jay Bhakta, Carmen Morales | 2003-07-22 |