Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630361 | Use of scatterometry for in-situ control of gaseous phase chemical trim process | Bhanwar Singh, Bharath Rangarajan, Michael K. Templeton, Ramkumar Subramanian | 2003-10-07 |
| 6597463 | System to determine suitability of sion arc surface for DUV resist patterning | Bhanwar Singh, Jay Bhakta, Carmen Morales, Junwei Bao | 2003-07-22 |