Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586339 | Silicon barrier layer to prevent resist poisoning | Marina V. Plat, Robert B. Ogle | 2003-07-01 |
| 6534411 | Method of high density plasma metal etching | Wenge Yang | 2003-03-18 |
| 6515328 | Semiconductor devices with reduced control gate dimensions | Wenge Yang, Mark S. Chang | 2003-02-04 |