Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656749 | In-situ monitoring during laser thermal annealing | Eric N. Paton, Bin Yu, Cyrus E. Tabery, Qi Xiang | 2003-12-02 |
| 6645882 | Preparation of composite high-K/standard-K dielectrics for semiconductor devices | Arvind Halliyal, Joong S. Jeon, Minh Van Ngo | 2003-11-11 |
| 6620705 | Nitriding pretreatment of ONO nitride for oxide deposition | Arvind Halliyal | 2003-09-16 |
| 6586339 | Silicon barrier layer to prevent resist poisoning | Marina V. Plat, Lewis Shen | 2003-07-01 |
| 6555439 | Partial recrystallization of source/drain region before laser thermal annealing | Qi Xiang, Eric N. Paton, Cyrus E. Tabery, Bin Yu | 2003-04-29 |
| 6551888 | Tuning absorption levels during laser thermal annealing | Cyrus E. Tabery, Eric N. Paton, Bin Yu, Qi Xiang | 2003-04-22 |
| 6512264 | Flash memory having pre-interpoly dielectric treatment layer and method of forming | Arvind Halliyal | 2003-01-28 |