Issued Patents 2003
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541184 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Sanjay K. Yedur | 2003-04-01 |
| 6535288 | Machine readable code to trigger data collection | Bharath Rangarajan, Bhanwar Singh, Khoi A. Phan | 2003-03-18 |
| 6534243 | Chemical feature doubling process | Ramkumar Subramanian, Bharath Rangarajan, Kathleen R. Early, Ursula Q. Quinto | 2003-03-18 |
| 6524944 | Low k ILD process by removable ILD | Bharath Rangarajan, Ramkumar Subramanian | 2003-02-25 |
| 6513996 | Integrated equipment to drain water-hexane developer for pattern collapse | Ramkumar Subramanian, Bhanwar Singh | 2003-02-04 |