Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613646 | Methods for reduced trench isolation step height | Krishnashree Achuthan | 2003-09-02 |
| 6569747 | Methods for trench isolation with reduced step height | Krishnashree Achuthan | 2003-05-27 |
| 6518185 | Integration scheme for non-feature-size dependent cu-alloy introduction | Pin-Chin Connie Wang, Fei Wang, Steven C. Avanzino, Amit P. Marathe, Matthew S. Buynoski +2 more | 2003-02-11 |
| 6503418 | Ta barrier slurry containing an organic additive | Diana M. Schonauer, Steven C. Avanzino | 2003-01-07 |