Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660331 | MOCVD of SBT using toluene-based solvent system for precursor delivery | Bryan C. Hendrix, Debra Desrochers Christos, Jeffrey F. Roeder | 2003-12-09 |
| 6639080 | Pyrazolate copper complexes, and MOCVD of copper using same | Chongying Xu, Ziyun Wang | 2003-10-28 |
| 6623656 | Source reagent composition for CVD formation of Zr/Hf doped gate dielectric and high dielectric constant metal oxide thin films and method of using same | Chongying Xu, Witold Paw, Bryan C. Hendrix, Jeffrey F. Roeder, Ziyun Wang | 2003-09-23 |
| 6602549 | Indium source reagent composition, and use thereof for deposition of indium-containing films on subtrates and ion implantation of indium-doped shallow junction microelectronic structures | Chongying Xu | 2003-08-05 |
| 6596236 | Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same | Frank Dimeo, Jr. | 2003-07-22 |
| 6589329 | Composition and process for production of copper circuitry in microelectronic device structures | Chongying Xu | 2003-07-08 |
| 6559328 | Indium source reagent compositions, and use thereof for deposition of indium-containing films on substrates and ion implantation of indium-doped shallow junction microelectronic structures | Chongying Xu | 2003-05-06 |
| 6527819 | Polishing slurries for copper and associated materials | William A. Wojtczak, Long Nguyen, Cary Regulski | 2003-03-04 |
| 6511706 | MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery | Bryan C. Hendrix, Debra A. Desrochers-Christos, Jeffrey F. Roeder, Witold Paw | 2003-01-28 |
| 6504015 | Tetrahydrofuran-adducted group II &bgr;-diketonate complexes as source reagents for chemical vapor deposition | Witold Paw | 2003-01-07 |