Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623656 | Source reagent composition for CVD formation of Zr/Hf doped gate dielectric and high dielectric constant metal oxide thin films and method of using same | Thomas H. Baum, Chongying Xu, Bryan C. Hendrix, Jeffrey F. Roeder, Ziyun Wang | 2003-09-23 |
| 6511706 | MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery | Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers-Christos, Jeffrey F. Roeder | 2003-01-28 |
| 6504015 | Tetrahydrofuran-adducted group II &bgr;-diketonate complexes as source reagents for chemical vapor deposition | Thomas H. Baum | 2003-01-07 |