Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660331 | MOCVD of SBT using toluene-based solvent system for precursor delivery | Bryan C. Hendrix, Thomas H. Baum, Debra Desrochers Christos | 2003-12-09 |
| 6623656 | Source reagent composition for CVD formation of Zr/Hf doped gate dielectric and high dielectric constant metal oxide thin films and method of using same | Thomas H. Baum, Chongying Xu, Witold Paw, Bryan C. Hendrix, Ziyun Wang | 2003-09-23 |
| 6599447 | Zirconium-doped BST materials and MOCVD process forming same | Gregory T. Stauf, Philip S. H. Chen | 2003-07-29 |
| 6514835 | Stress control of thin films by mechanical deformation of wafer substrate | Bryan C. Hendrix, Steven M. Bilodeau | 2003-02-04 |
| 6511706 | MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery | Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers-Christos, Witold Paw | 2003-01-28 |