Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639080 | Pyrazolate copper complexes, and MOCVD of copper using same | Thomas H. Baum, Ziyun Wang | 2003-10-28 |
| 6623656 | Source reagent composition for CVD formation of Zr/Hf doped gate dielectric and high dielectric constant metal oxide thin films and method of using same | Thomas H. Baum, Witold Paw, Bryan C. Hendrix, Jeffrey F. Roeder, Ziyun Wang | 2003-09-23 |
| 6602549 | Indium source reagent composition, and use thereof for deposition of indium-containing films on subtrates and ion implantation of indium-doped shallow junction microelectronic structures | Thomas H. Baum | 2003-08-05 |
| 6589329 | Composition and process for production of copper circuitry in microelectronic device structures | Thomas H. Baum | 2003-07-08 |
| 6559328 | Indium source reagent compositions, and use thereof for deposition of indium-containing films on substrates and ion implantation of indium-doped shallow junction microelectronic structures | Thomas H. Baum | 2003-05-06 |