Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660331 | MOCVD of SBT using toluene-based solvent system for precursor delivery | Thomas H. Baum, Debra Desrochers Christos, Jeffrey F. Roeder | 2003-12-09 |
| 6623656 | Source reagent composition for CVD formation of Zr/Hf doped gate dielectric and high dielectric constant metal oxide thin films and method of using same | Thomas H. Baum, Chongying Xu, Witold Paw, Jeffrey F. Roeder, Ziyun Wang | 2003-09-23 |
| 6514835 | Stress control of thin films by mechanical deformation of wafer substrate | Jeffrey F. Roeder, Steven M. Bilodeau | 2003-02-04 |
| 6511706 | MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery | Thomas H. Baum, Debra A. Desrochers-Christos, Jeffrey F. Roeder, Witold Paw | 2003-01-28 |