Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440838 | Dual damascene structure employing laminated intermediate etch stop layer | Mei-Hui Sung | 2002-08-27 |
| 6429119 | Dual damascene process to reduce etch barrier thickness | Li-Chih Chao, Chia-Shiung Tsai, Jen-Cheng Liu, Chao-Cheng Chen | 2002-08-06 |
| 6399483 | Method for improving faceting effect in dual damascene process | Jen-Cheng Liu, Hun-Jan Tao, Chia-Shiung Tsai | 2002-06-04 |