Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461494 | Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot | Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer | 2002-10-08 |
| 6454926 | Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas | Thomas Ritzdorf, Jeffrey I. Turner | 2002-09-24 |
| 6440178 | Modular semiconductor workpiece processing tool | Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2002-08-27 |