Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497801 | Electroplating apparatus with segmented anode array | Kyle M. Hanson | 2002-12-24 |
| 6440178 | Modular semiconductor workpiece processing tool | Robert W. Berner, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2002-08-27 |
| 6428660 | Reactor vessel having improved cup, anode and conductor assembly | Kyle M. Hanson | 2002-08-06 |
| 6428662 | Reactor vessel having improved cup, anode and conductor assembly | Kyle M. Hanson | 2002-08-06 |
| 6409892 | Reactor vessel having improved cup, anode, and conductor assembly | Kyle M. Hanson | 2002-06-25 |
| 6342137 | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same | Martin Bleck | 2002-01-29 |