Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497801 | Electroplating apparatus with segmented anode array | Daniel J. Woodruff | 2002-12-24 |
| 6471460 | Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly | John M. Pedersen | 2002-10-29 |
| 6428660 | Reactor vessel having improved cup, anode and conductor assembly | Daniel J. Woodruff | 2002-08-06 |
| 6428662 | Reactor vessel having improved cup, anode and conductor assembly | Daniel J. Woodruff | 2002-08-06 |
| 6409892 | Reactor vessel having improved cup, anode, and conductor assembly | Daniel J. Woodruff | 2002-06-25 |
| 6368475 | Apparatus for electrochemically processing a microelectronic workpiece | Scott Grace, Matt Johnson, Ken Gibbons | 2002-04-09 |
| 6358388 | Plating system workpiece support having workpiece-engaging electrodes with distal contact-part and dielectric cover | Martin Bleck, Lyndon Graham | 2002-03-19 |