Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440178 | Modular semiconductor workpiece processing tool | Robert W. Berner, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Worm Lund | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440178 | Modular semiconductor workpiece processing tool | Robert W. Berner, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Worm Lund | 2002-08-27 |