Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454926 | Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas | Jeffrey I. Turner, Robert W. Berner | 2002-09-24 |
| 6428673 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Steve Eudy, Gregory J. Wilson, Paul R. McHugh | 2002-08-06 |
| 6365033 | Methods for controlling and/or measuring additive concentration in an electroplating bath | Lyndon Graham, Thomas C. Taylor, Fredrick A. Lindberg, Bradley C. Carpenter | 2002-04-02 |
| 6334937 | Apparatus for high deposition rate solder electroplating on a microelectronic workpiece | Robert W. Batz, Jr., Scot Conrady | 2002-01-01 |