Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471913 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Robert A. Weaver, Paul R. McHugh | 2002-10-29 |
| 6428673 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Thomas Ritzdorf, Steve Eudy, Paul R. McHugh | 2002-08-06 |