Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471913 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Robert A. Weaver, Gregory J. Wilson | 2002-10-29 |
| 6441350 | Temperature control system for a thermal reactor | Kevin Stoddard, Konstantinos Tsakalis | 2002-08-27 |
| 6428673 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Thomas Ritzdorf, Steve Eudy, Gregory J. Wilson | 2002-08-06 |