Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471913 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Paul R. McHugh, Gregory J. Wilson | 2002-10-29 |
| 6370791 | Processing machine with lockdown rotor | Ronald Schlagenhauser | 2002-04-16 |