Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | In-Sang Jeon, Sang-Bom Kang, Sang In Lee, Kyu Wan Ryu | 2002-11-12 |
| 6458701 | Method for forming metal layer of semiconductor device using metal halide gas | Sang-Bom Kang, Gil-Heyun Choi, In-Sang Jeon | 2002-10-01 |
| 6372598 | Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same | Sang-Bum Kang, Sang In Lee, Hyun-Seok Lim, Mee-Young Yoon | 2002-04-16 |