Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | Yun-sook Chae, In-Sang Jeon, Sang-Bom Kang, Sang In Lee | 2002-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | Yun-sook Chae, In-Sang Jeon, Sang-Bom Kang, Sang In Lee | 2002-11-12 |