Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | Yun-sook Chae, In-Sang Jeon, Sang-Bom Kang, Kyu Wan Ryu | 2002-11-12 |
| 6391769 | Method for forming metal interconnection in semiconductor device and interconnection structure fabricated thereby | Jong-Myeong Lee, Hyun-Seok Lim, Byung-Hee Kim, Gil-Heyun Choi | 2002-05-21 |
| 6376355 | Method for forming metal interconnection in semiconductor device | Mee-Young Yoon | 2002-04-23 |
| 6372598 | Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same | Sang-Bum Kang, Yun-sook Chae, Hyun-Seok Lim, Mee-Young Yoon | 2002-04-16 |
| 6358829 | Semiconductor device fabrication method using an interface control layer to improve a metal interconnection layer | Mee-Young Yoon, Hyun-Seok Lim | 2002-03-19 |