Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399491 | Method of manufacturing a barrier metal layer using atomic layer deposition | In-Sang Jeon, Sang-Bom Kang, Gil-Heyun Choi | 2002-06-04 |
| 6391769 | Method for forming metal interconnection in semiconductor device and interconnection structure fabricated thereby | Jong-Myeong Lee, Byung-Hee Kim, Gil-Heyun Choi, Sang In Lee | 2002-05-21 |
| 6372598 | Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same | Sang-Bum Kang, Yun-sook Chae, Sang In Lee, Mee-Young Yoon | 2002-04-16 |
| 6358829 | Semiconductor device fabrication method using an interface control layer to improve a metal interconnection layer | Mee-Young Yoon, Sang In Lee | 2002-03-19 |
| 6348376 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same | Sang-Bom Kang, In-Sang Jeon, Gil-Heyun Choi | 2002-02-19 |