Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458701 | Method for forming metal layer of semiconductor device using metal halide gas | Yun-sook Chae, Sang-Bom Kang, In-Sang Jeon | 2002-10-01 |
| 6432820 | Method of selectively depositing a metal layer in an opening in a dielectric layer by forming a metal-deposition-prevention layer around the opening of the dielectric layer | Myoung-Bum Lee, Jong-Myeong Lee, Byung-Hee Kim | 2002-08-13 |
| 6399491 | Method of manufacturing a barrier metal layer using atomic layer deposition | In-Sang Jeon, Sang-Bom Kang, Hyun-Seok Lim | 2002-06-04 |
| 6391769 | Method for forming metal interconnection in semiconductor device and interconnection structure fabricated thereby | Jong-Myeong Lee, Hyun-Seok Lim, Byung-Hee Kim, Sang In Lee | 2002-05-21 |
| 6355554 | Methods of forming filled interconnections in microelectronic devices | Eung-Joon Lee, Byeong-Jun Kim | 2002-03-12 |
| 6348376 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same | Hyun-Seok Lim, Sang-Bom Kang, In-Sang Jeon | 2002-02-19 |