Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | Yun-sook Chae, In-Sang Jeon, Sang In Lee, Kyu Wan Ryu | 2002-11-12 |
| 6458701 | Method for forming metal layer of semiconductor device using metal halide gas | Yun-sook Chae, Gil-Heyun Choi, In-Sang Jeon | 2002-10-01 |
| 6399491 | Method of manufacturing a barrier metal layer using atomic layer deposition | In-Sang Jeon, Hyun-Seok Lim, Gil-Heyun Choi | 2002-06-04 |
| 6348376 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same | Hyun-Seok Lim, In-Sang Jeon, Gil-Heyun Choi | 2002-02-19 |