Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning | Hak-pil Kim, Eun-Hee Shin, Baik-Soon Choi | 2002-12-31 |
| 6494927 | Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk | Baik-Soon Choi, Jin-Sung Kim, Kyue-sang Choi | 2002-12-17 |
| 6464794 | Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates | Jeong-hyuck Park, Hee-duk Kim, Jung-hun Cho, Jong-wook Choi, Young-Koo Lee +6 more | 2002-10-15 |
| 6335284 | Metallization process for manufacturing semiconductor devices | Baik-Soon Choi, Jae-saeng Lee, Eun-Hee Shin | 2002-01-01 |