Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494927 | Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk | Sung-bum Cho, Baik-Soon Choi, Jin-Sung Kim | 2002-12-17 |