Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning | Sung-bum Cho, Hak-pil Kim, Eun-Hee Shin | 2002-12-31 |
| 6494927 | Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk | Sung-bum Cho, Jin-Sung Kim, Kyue-sang Choi | 2002-12-17 |
| 6432838 | Chemical vapor deposition apparatus for manufacturing semiconductor devices, its driving method, and method of optimizing recipe of cleaning process for process chamber | Jung-il An, Jin-Sung Kim, Jung Ki Kim | 2002-08-13 |
| 6335284 | Metallization process for manufacturing semiconductor devices | Jae-saeng Lee, Eun-Hee Shin, Sung-bum Cho | 2002-01-01 |