Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning | Sung-bum Cho, Hak-pil Kim, Baik-Soon Choi | 2002-12-31 |
| 6335284 | Metallization process for manufacturing semiconductor devices | Baik-Soon Choi, Jae-saeng Lee, Sung-bum Cho | 2002-01-01 |