Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning | Sung-bum Cho, Eun-Hee Shin, Baik-Soon Choi | 2002-12-31 |
HK
Hak-pil Kim
Overall (2002): #210,563 of 266,432Top 80%
1
Patents 2002