Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432838 | Chemical vapor deposition apparatus for manufacturing semiconductor devices, its driving method, and method of optimizing recipe of cleaning process for process chamber | Baik-Soon Choi, Jung-il An, Jin-Sung Kim | 2002-08-13 |
| 6339719 | Apparatus and method for detecting sounds from a human body and displaying the detected sound information | Myun Woo Lee, Chang Kyu Cho, Cha Ryong Koo | 2002-01-15 |