Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464794 | Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates | Jeong-hyuck Park, Hee-duk Kim, Jung-hun Cho, Sung-bum Cho, Young-Koo Lee +6 more | 2002-10-15 |