Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479801 | Temperature measuring method, temperature control method and processing apparatus | Takashi Shigeoka | 2002-11-12 |
| 6473993 | Thermal treatment method and apparatus | Yasushi Yagi, Wataru Okase, Masayuki Kitamura, Hironori Yagi, Eisuke Morisaki | 2002-11-05 |
| 6437290 | Heat treatment apparatus having a thin light-transmitting window | ShouQian Shao, Yicheng Li, Takashi Shigeoka | 2002-08-20 |
| 6403988 | Semiconductor device with reverse conducting faculty | Katsuji Iida, Yuichiro Imanishi, Naohiro Shimizu | 2002-06-11 |
| 6359424 | Switching circuit for generating pulsed power | Katsuji Iida, Tatsuhiko Hatano, Wataru Shionoya | 2002-03-19 |