TS

Takashi Shigeoka

TL Tokyo Electron Limited: 4 patents #14 of 413Top 4%
📍 Chofu, JP: #4 of 46 inventorsTop 9%
Overall (2002): #11,708 of 266,432Top 5%
4
Patents 2002

Issued Patents 2002

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
6488407 Radiation temperature measuring method and radiation temperature measuring system Masayuki Kitamura, Eisuke Morisaki, Nobuaki Takahashi 2002-12-03
6479801 Temperature measuring method, temperature control method and processing apparatus Takeshi Sakuma 2002-11-12
6467952 Virtual blackbody radiation system and radiation temperature measuring system Eisuke Morisaki, Masayuki Kitamura, Nobuaki Takahashi 2002-10-22
6437290 Heat treatment apparatus having a thin light-transmitting window ShouQian Shao, Yicheng Li, Takeshi Sakuma 2002-08-20