Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448536 | Single-substrate-heat-processing apparatus for semiconductor process | Toshio Takagi | 2002-09-10 |
| 6437290 | Heat treatment apparatus having a thin light-transmitting window | ShouQian Shao, Takashi Shigeoka, Takeshi Sakuma | 2002-08-20 |
| 6403926 | Thermal processing apparatus having a coolant passage | — | 2002-06-11 |