HY

Hironori Yagi

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #204,215 of 266,432Top 80%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6473993 Thermal treatment method and apparatus Yasushi Yagi, Takeshi Sakuma, Wataru Okase, Masayuki Kitamura, Eisuke Morisaki 2002-11-05