Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497767 | Thermal processing unit for single substrate | Wataru Okase | 2002-12-24 |
| 6473993 | Thermal treatment method and apparatus | Takeshi Sakuma, Wataru Okase, Masayuki Kitamura, Hironori Yagi, Eisuke Morisaki | 2002-11-05 |