Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497767 | Thermal processing unit for single substrate | Yasushi Yagi | 2002-12-24 |
| 6473993 | Thermal treatment method and apparatus | Yasushi Yagi, Takeshi Sakuma, Masayuki Kitamura, Hironori Yagi, Eisuke Morisaki | 2002-11-05 |
| 6402848 | Single-substrate-treating apparatus for semiconductor processing system | Takahiro Horiguchi, Eiichiro Takanabe | 2002-06-11 |
| 6399922 | Single-substrate-heat-treating apparatus for semiconductor process system | Masaaki Hasei | 2002-06-04 |