Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501636 | Electrostatic clamp for holding workpieces with irregular surfaces | John Zajac | 2002-12-31 |
| 6395641 | Apparatus and method for pulsed plasma processing of a semiconductor substrate | — | 2002-05-28 |
| 6379576 | Systems and methods for variable mode plasma enhanced processing of semiconductor wafers | Leroy Luo, Rene George, Craig Ranft, Wolfgang Helle, Robert Guerra | 2002-04-30 |
| 6355909 | Method and apparatus for thermal processing of semiconductor substrates | Stewart Griffiths, Robert H. Nilson, Brad S. Mattson | 2002-03-12 |
| 6342691 | Apparatus and method for thermal processing of semiconductor substrates | Kristian E. Johnsgard, Jean-François Daviet, James A. Givens, Brad S. Mattson, Ashur J. ATANOS | 2002-01-29 |